光學測量技術

- FSM RAMAN 360 (Spectroscopy Metrology)

- FSM 127 (Imaging Interferometer)

- FSM 128 (up to 200mm)

- FSM 128L (up to 300mm)

- FSM 413 (Optical EchoProbe)

 電機測量技術

- FSM RsL100 (Sheet Resistance and Leakage Current Mapping Tool)

- FSM 4PP (C2C Sheet Resistance Mapping System)

- FSM MC100 (Metal Contamination Testing on Production Wafers)

- FSM EOT (CV)

材料制備與表征

- FSM 500TC (Stress Measurement System with Rotation)

- FSM 900TC (Integrated Metrology Annealing Chamber)

- FSM TCVac (Integrated Metrology Annealing Chamber for Cu)

- Aquaflex (4 Point Bent System)

- Laminar (Quantitative Adhesion Tester)

- Die Flexer (Die Tester)